JPS5376559U - - Google Patents

Info

Publication number
JPS5376559U
JPS5376559U JP1976160757U JP16075776U JPS5376559U JP S5376559 U JPS5376559 U JP S5376559U JP 1976160757 U JP1976160757 U JP 1976160757U JP 16075776 U JP16075776 U JP 16075776U JP S5376559 U JPS5376559 U JP S5376559U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1976160757U
Other languages
Japanese (ja)
Other versions
JPS5647471Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976160757U priority Critical patent/JPS5647471Y2/ja
Publication of JPS5376559U publication Critical patent/JPS5376559U/ja
Application granted granted Critical
Publication of JPS5647471Y2 publication Critical patent/JPS5647471Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Air Filters, Heat-Exchange Apparatuses, And Housings Of Air-Conditioning Units (AREA)
  • Air-Flow Control Members (AREA)
JP1976160757U 1976-11-30 1976-11-30 Expired JPS5647471Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976160757U JPS5647471Y2 (enrdf_load_stackoverflow) 1976-11-30 1976-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976160757U JPS5647471Y2 (enrdf_load_stackoverflow) 1976-11-30 1976-11-30

Publications (2)

Publication Number Publication Date
JPS5376559U true JPS5376559U (enrdf_load_stackoverflow) 1978-06-26
JPS5647471Y2 JPS5647471Y2 (enrdf_load_stackoverflow) 1981-11-06

Family

ID=28768614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976160757U Expired JPS5647471Y2 (enrdf_load_stackoverflow) 1976-11-30 1976-11-30

Country Status (1)

Country Link
JP (1) JPS5647471Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5666744U (enrdf_load_stackoverflow) * 1979-10-29 1981-06-03
US7416370B2 (en) 2005-06-15 2008-08-26 Lam Research Corporation Method and apparatus for transporting a substrate using non-Newtonian fluid
US7441299B2 (en) 2003-12-23 2008-10-28 Lam Research Corporation Apparatuses and methods for cleaning a substrate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS452610Y1 (enrdf_load_stackoverflow) * 1967-09-08 1970-02-03
JPS4949641U (enrdf_load_stackoverflow) * 1972-08-04 1974-05-01

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS452610Y1 (enrdf_load_stackoverflow) * 1967-09-08 1970-02-03
JPS4949641U (enrdf_load_stackoverflow) * 1972-08-04 1974-05-01

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5666744U (enrdf_load_stackoverflow) * 1979-10-29 1981-06-03
US7441299B2 (en) 2003-12-23 2008-10-28 Lam Research Corporation Apparatuses and methods for cleaning a substrate
US7416370B2 (en) 2005-06-15 2008-08-26 Lam Research Corporation Method and apparatus for transporting a substrate using non-Newtonian fluid

Also Published As

Publication number Publication date
JPS5647471Y2 (enrdf_load_stackoverflow) 1981-11-06

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