JPS5375068U - - Google Patents
Info
- Publication number
- JPS5375068U JPS5375068U JP15699976U JP15699976U JPS5375068U JP S5375068 U JPS5375068 U JP S5375068U JP 15699976 U JP15699976 U JP 15699976U JP 15699976 U JP15699976 U JP 15699976U JP S5375068 U JPS5375068 U JP S5375068U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15699976U JPS5375068U (bs) | 1976-11-25 | 1976-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15699976U JPS5375068U (bs) | 1976-11-25 | 1976-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5375068U true JPS5375068U (bs) | 1978-06-22 |
Family
ID=28765046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15699976U Pending JPS5375068U (bs) | 1976-11-25 | 1976-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5375068U (bs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58138918U (ja) * | 1982-03-12 | 1983-09-19 | 中興化成工業株式会社 | レンズ等の洗浄用支持装置 |
| JPH07169731A (ja) * | 1993-12-14 | 1995-07-04 | Shin Etsu Handotai Co Ltd | ウェーハ洗浄槽 |
-
1976
- 1976-11-25 JP JP15699976U patent/JPS5375068U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58138918U (ja) * | 1982-03-12 | 1983-09-19 | 中興化成工業株式会社 | レンズ等の洗浄用支持装置 |
| JPH07169731A (ja) * | 1993-12-14 | 1995-07-04 | Shin Etsu Handotai Co Ltd | ウェーハ洗浄槽 |