JPS5367194A - Space charge neutralizing device - Google Patents

Space charge neutralizing device

Info

Publication number
JPS5367194A
JPS5367194A JP14234576A JP14234576A JPS5367194A JP S5367194 A JPS5367194 A JP S5367194A JP 14234576 A JP14234576 A JP 14234576A JP 14234576 A JP14234576 A JP 14234576A JP S5367194 A JPS5367194 A JP S5367194A
Authority
JP
Japan
Prior art keywords
space charge
neutralizing device
charge neutralizing
space
neutralizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14234576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5744217B2 (enrdf_load_stackoverflow
Inventor
Osamu Tsukagoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP14234576A priority Critical patent/JPS5367194A/ja
Publication of JPS5367194A publication Critical patent/JPS5367194A/ja
Publication of JPS5744217B2 publication Critical patent/JPS5744217B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
  • Electron Sources, Ion Sources (AREA)
JP14234576A 1976-11-29 1976-11-29 Space charge neutralizing device Granted JPS5367194A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14234576A JPS5367194A (en) 1976-11-29 1976-11-29 Space charge neutralizing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14234576A JPS5367194A (en) 1976-11-29 1976-11-29 Space charge neutralizing device

Publications (2)

Publication Number Publication Date
JPS5367194A true JPS5367194A (en) 1978-06-15
JPS5744217B2 JPS5744217B2 (enrdf_load_stackoverflow) 1982-09-20

Family

ID=15313191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14234576A Granted JPS5367194A (en) 1976-11-29 1976-11-29 Space charge neutralizing device

Country Status (1)

Country Link
JP (1) JPS5367194A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63185917U (enrdf_load_stackoverflow) * 1987-05-25 1988-11-29

Also Published As

Publication number Publication date
JPS5744217B2 (enrdf_load_stackoverflow) 1982-09-20

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