JPS5364676U - - Google Patents

Info

Publication number
JPS5364676U
JPS5364676U JP14599676U JP14599676U JPS5364676U JP S5364676 U JPS5364676 U JP S5364676U JP 14599676 U JP14599676 U JP 14599676U JP 14599676 U JP14599676 U JP 14599676U JP S5364676 U JPS5364676 U JP S5364676U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14599676U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14599676U priority Critical patent/JPS5364676U/ja
Publication of JPS5364676U publication Critical patent/JPS5364676U/ja
Pending legal-status Critical Current

Links

JP14599676U 1976-10-30 1976-10-30 Pending JPS5364676U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14599676U JPS5364676U (en) 1976-10-30 1976-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14599676U JPS5364676U (en) 1976-10-30 1976-10-30

Publications (1)

Publication Number Publication Date
JPS5364676U true JPS5364676U (en) 1978-05-31

Family

ID=28754508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14599676U Pending JPS5364676U (en) 1976-10-30 1976-10-30

Country Status (1)

Country Link
JP (1) JPS5364676U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5969494A (en) * 1982-10-14 1984-04-19 Ulvac Corp Reaction and treatment apparatus for low pressure gas or vapor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS411326Y1 (en) * 1964-07-10 1966-02-02

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS411326Y1 (en) * 1964-07-10 1966-02-02

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5969494A (en) * 1982-10-14 1984-04-19 Ulvac Corp Reaction and treatment apparatus for low pressure gas or vapor

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