JPS5363709U - - Google Patents
Info
- Publication number
- JPS5363709U JPS5363709U JP1977139584U JP13958477U JPS5363709U JP S5363709 U JPS5363709 U JP S5363709U JP 1977139584 U JP1977139584 U JP 1977139584U JP 13958477 U JP13958477 U JP 13958477U JP S5363709 U JPS5363709 U JP S5363709U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977139584U JPS5363709U (ja) | 1977-10-18 | 1977-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1977139584U JPS5363709U (ja) | 1977-10-18 | 1977-10-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5363709U true JPS5363709U (ja) | 1978-05-29 |
Family
ID=28748347
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1977139584U Pending JPS5363709U (ja) | 1977-10-18 | 1977-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5363709U (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5844295A (ja) * | 1981-08-26 | 1983-03-15 | ライボルト−ヘレ−ウス・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 向流式漏れ検出を行なうのに適したタ−ボ分子ポンプ |
| JPS58193094U (ja) * | 1982-06-20 | 1983-12-22 | 株式会社島津製作所 | タ−ボ分子ポンプ |
| JPS63266189A (ja) * | 1987-04-24 | 1988-11-02 | Hitachi Ltd | 真空ポンプ |
| EP4130481A4 (en) * | 2020-03-31 | 2024-04-10 | Edwards Japan Limited | VACUUM PUMP AND PIPING STRUCTURE FOR VACUUM PUMP |
-
1977
- 1977-10-18 JP JP1977139584U patent/JPS5363709U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5844295A (ja) * | 1981-08-26 | 1983-03-15 | ライボルト−ヘレ−ウス・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 向流式漏れ検出を行なうのに適したタ−ボ分子ポンプ |
| JPS58193094U (ja) * | 1982-06-20 | 1983-12-22 | 株式会社島津製作所 | タ−ボ分子ポンプ |
| JPS63266189A (ja) * | 1987-04-24 | 1988-11-02 | Hitachi Ltd | 真空ポンプ |
| EP4130481A4 (en) * | 2020-03-31 | 2024-04-10 | Edwards Japan Limited | VACUUM PUMP AND PIPING STRUCTURE FOR VACUUM PUMP |