JPS536284U - - Google Patents

Info

Publication number
JPS536284U
JPS536284U JP8581676U JP8581676U JPS536284U JP S536284 U JPS536284 U JP S536284U JP 8581676 U JP8581676 U JP 8581676U JP 8581676 U JP8581676 U JP 8581676U JP S536284 U JPS536284 U JP S536284U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8581676U
Other languages
Japanese (ja)
Other versions
JPS5415114Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8581676U priority Critical patent/JPS5415114Y2/ja
Publication of JPS536284U publication Critical patent/JPS536284U/ja
Application granted granted Critical
Publication of JPS5415114Y2 publication Critical patent/JPS5415114Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP8581676U 1976-07-01 1976-07-01 Expired JPS5415114Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8581676U JPS5415114Y2 (en) 1976-07-01 1976-07-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8581676U JPS5415114Y2 (en) 1976-07-01 1976-07-01

Publications (2)

Publication Number Publication Date
JPS536284U true JPS536284U (en) 1978-01-20
JPS5415114Y2 JPS5415114Y2 (en) 1979-06-19

Family

ID=28696716

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8581676U Expired JPS5415114Y2 (en) 1976-07-01 1976-07-01

Country Status (1)

Country Link
JP (1) JPS5415114Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02190751A (en) * 1989-01-20 1990-07-26 Shin Etsu Handotai Co Ltd Azimuth deciding and inspecting device for semiconductor wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02190751A (en) * 1989-01-20 1990-07-26 Shin Etsu Handotai Co Ltd Azimuth deciding and inspecting device for semiconductor wafer

Also Published As

Publication number Publication date
JPS5415114Y2 (en) 1979-06-19

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