JPS5361404A - Method of producing pattern - Google Patents

Method of producing pattern

Info

Publication number
JPS5361404A
JPS5361404A JP13607176A JP13607176A JPS5361404A JP S5361404 A JPS5361404 A JP S5361404A JP 13607176 A JP13607176 A JP 13607176A JP 13607176 A JP13607176 A JP 13607176A JP S5361404 A JPS5361404 A JP S5361404A
Authority
JP
Japan
Prior art keywords
producing pattern
pattern
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13607176A
Other languages
Japanese (ja)
Other versions
JPS5537739B2 (en
Inventor
Akira Yoshikawa
Haruo Nagai
Osamu Ochi
Kazuko Nakano
Nobuhiko Mizushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP13607176A priority Critical patent/JPS5361404A/en
Publication of JPS5361404A publication Critical patent/JPS5361404A/en
Publication of JPS5537739B2 publication Critical patent/JPS5537739B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP13607176A 1976-11-12 1976-11-12 Method of producing pattern Granted JPS5361404A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13607176A JPS5361404A (en) 1976-11-12 1976-11-12 Method of producing pattern

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13607176A JPS5361404A (en) 1976-11-12 1976-11-12 Method of producing pattern

Publications (2)

Publication Number Publication Date
JPS5361404A true JPS5361404A (en) 1978-06-01
JPS5537739B2 JPS5537739B2 (en) 1980-09-30

Family

ID=15166532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13607176A Granted JPS5361404A (en) 1976-11-12 1976-11-12 Method of producing pattern

Country Status (1)

Country Link
JP (1) JPS5361404A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4995702A (en) * 1972-12-18 1974-09-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4995702A (en) * 1972-12-18 1974-09-11

Also Published As

Publication number Publication date
JPS5537739B2 (en) 1980-09-30

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