JPS5361404A - Method of producing pattern - Google Patents
Method of producing patternInfo
- Publication number
- JPS5361404A JPS5361404A JP13607176A JP13607176A JPS5361404A JP S5361404 A JPS5361404 A JP S5361404A JP 13607176 A JP13607176 A JP 13607176A JP 13607176 A JP13607176 A JP 13607176A JP S5361404 A JPS5361404 A JP S5361404A
- Authority
- JP
- Japan
- Prior art keywords
- producing pattern
- pattern
- producing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13607176A JPS5361404A (en) | 1976-11-12 | 1976-11-12 | Method of producing pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13607176A JPS5361404A (en) | 1976-11-12 | 1976-11-12 | Method of producing pattern |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5361404A true JPS5361404A (en) | 1978-06-01 |
JPS5537739B2 JPS5537739B2 (en) | 1980-09-30 |
Family
ID=15166532
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13607176A Granted JPS5361404A (en) | 1976-11-12 | 1976-11-12 | Method of producing pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5361404A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4995702A (en) * | 1972-12-18 | 1974-09-11 |
-
1976
- 1976-11-12 JP JP13607176A patent/JPS5361404A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4995702A (en) * | 1972-12-18 | 1974-09-11 |
Also Published As
Publication number | Publication date |
---|---|
JPS5537739B2 (en) | 1980-09-30 |
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