JPS5360771U - - Google Patents
Info
- Publication number
- JPS5360771U JPS5360771U JP14413376U JP14413376U JPS5360771U JP S5360771 U JPS5360771 U JP S5360771U JP 14413376 U JP14413376 U JP 14413376U JP 14413376 U JP14413376 U JP 14413376U JP S5360771 U JPS5360771 U JP S5360771U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976144133U JPS5344377Y2 (ja) | 1976-10-27 | 1976-10-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976144133U JPS5344377Y2 (ja) | 1976-10-27 | 1976-10-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5360771U true JPS5360771U (ja) | 1978-05-23 |
| JPS5344377Y2 JPS5344377Y2 (ja) | 1978-10-24 |
Family
ID=28752780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976144133U Expired JPS5344377Y2 (ja) | 1976-10-27 | 1976-10-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5344377Y2 (ja) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50148987U (ja) * | 1974-05-28 | 1975-12-10 |
-
1976
- 1976-10-27 JP JP1976144133U patent/JPS5344377Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50148987U (ja) * | 1974-05-28 | 1975-12-10 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5344377Y2 (ja) | 1978-10-24 |