JPS536067U - - Google Patents
Info
- Publication number
- JPS536067U JPS536067U JP8738276U JP8738276U JPS536067U JP S536067 U JPS536067 U JP S536067U JP 8738276 U JP8738276 U JP 8738276U JP 8738276 U JP8738276 U JP 8738276U JP S536067 U JPS536067 U JP S536067U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8738276U JPS536067U (en) | 1976-06-30 | 1976-06-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8738276U JPS536067U (en) | 1976-06-30 | 1976-06-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS536067U true JPS536067U (en) | 1978-01-19 |
Family
ID=28698189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8738276U Pending JPS536067U (en) | 1976-06-30 | 1976-06-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS536067U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020136537A (en) * | 2019-02-21 | 2020-08-31 | キオクシア株式会社 | Substrate processing apparatus |
-
1976
- 1976-06-30 JP JP8738276U patent/JPS536067U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020136537A (en) * | 2019-02-21 | 2020-08-31 | キオクシア株式会社 | Substrate processing apparatus |