JPS5360337A - Controlling method of stabilizing glow discharge in surface treatment using glow dicgarge and apparatus therefor - Google Patents

Controlling method of stabilizing glow discharge in surface treatment using glow dicgarge and apparatus therefor

Info

Publication number
JPS5360337A
JPS5360337A JP13563676A JP13563676A JPS5360337A JP S5360337 A JPS5360337 A JP S5360337A JP 13563676 A JP13563676 A JP 13563676A JP 13563676 A JP13563676 A JP 13563676A JP S5360337 A JPS5360337 A JP S5360337A
Authority
JP
Japan
Prior art keywords
glow
dicgarge
surface treatment
controlling method
apparatus therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13563676A
Other languages
Japanese (ja)
Other versions
JPS5856034B2 (en
Inventor
Hiroki Tanaka
Chiaki Ide
Kazue Kobayashi
Jiyunji Minokami
Kaneo Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electronics Industry Co Ltd
Original Assignee
Fuji Electronics Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electronics Industry Co Ltd filed Critical Fuji Electronics Industry Co Ltd
Priority to JP13563676A priority Critical patent/JPS5856034B2/en
Publication of JPS5360337A publication Critical patent/JPS5360337A/en
Publication of JPS5856034B2 publication Critical patent/JPS5856034B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Discharge Heating (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
JP13563676A 1976-11-10 1976-11-10 Glow discharge stabilization control method in metal surface treatment Expired JPS5856034B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13563676A JPS5856034B2 (en) 1976-11-10 1976-11-10 Glow discharge stabilization control method in metal surface treatment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13563676A JPS5856034B2 (en) 1976-11-10 1976-11-10 Glow discharge stabilization control method in metal surface treatment

Publications (2)

Publication Number Publication Date
JPS5360337A true JPS5360337A (en) 1978-05-30
JPS5856034B2 JPS5856034B2 (en) 1983-12-13

Family

ID=15156431

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13563676A Expired JPS5856034B2 (en) 1976-11-10 1976-11-10 Glow discharge stabilization control method in metal surface treatment

Country Status (1)

Country Link
JP (1) JPS5856034B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050170A (en) * 1983-08-26 1985-03-19 Nippon Denshi Kogyo Kk Plasma cvd treating device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050170A (en) * 1983-08-26 1985-03-19 Nippon Denshi Kogyo Kk Plasma cvd treating device

Also Published As

Publication number Publication date
JPS5856034B2 (en) 1983-12-13

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