JPS5359909A - Non-vaporous getter pump device - Google Patents

Non-vaporous getter pump device

Info

Publication number
JPS5359909A
JPS5359909A JP13411576A JP13411576A JPS5359909A JP S5359909 A JPS5359909 A JP S5359909A JP 13411576 A JP13411576 A JP 13411576A JP 13411576 A JP13411576 A JP 13411576A JP S5359909 A JPS5359909 A JP S5359909A
Authority
JP
Japan
Prior art keywords
vaporous
pump device
getter pump
getter
gianed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13411576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6132515B2 (cs
Inventor
Yasushi Nakaizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13411576A priority Critical patent/JPS5359909A/ja
Publication of JPS5359909A publication Critical patent/JPS5359909A/ja
Publication of JPS6132515B2 publication Critical patent/JPS6132515B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electron Tubes For Measurement (AREA)
JP13411576A 1976-11-10 1976-11-10 Non-vaporous getter pump device Granted JPS5359909A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13411576A JPS5359909A (en) 1976-11-10 1976-11-10 Non-vaporous getter pump device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13411576A JPS5359909A (en) 1976-11-10 1976-11-10 Non-vaporous getter pump device

Publications (2)

Publication Number Publication Date
JPS5359909A true JPS5359909A (en) 1978-05-30
JPS6132515B2 JPS6132515B2 (cs) 1986-07-28

Family

ID=15120799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13411576A Granted JPS5359909A (en) 1976-11-10 1976-11-10 Non-vaporous getter pump device

Country Status (1)

Country Link
JP (1) JPS5359909A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH021418U (cs) * 1988-06-13 1990-01-08

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917764A (cs) * 1972-06-05 1974-02-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4917764A (cs) * 1972-06-05 1974-02-16

Also Published As

Publication number Publication date
JPS6132515B2 (cs) 1986-07-28

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