JPS5359374U - - Google Patents
Info
- Publication number
- JPS5359374U JPS5359374U JP14107576U JP14107576U JPS5359374U JP S5359374 U JPS5359374 U JP S5359374U JP 14107576 U JP14107576 U JP 14107576U JP 14107576 U JP14107576 U JP 14107576U JP S5359374 U JPS5359374 U JP S5359374U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14107576U JPS6028137Y2 (ja) | 1976-10-20 | 1976-10-20 | 電子ビ−ム露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14107576U JPS6028137Y2 (ja) | 1976-10-20 | 1976-10-20 | 電子ビ−ム露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5359374U true JPS5359374U (OSRAM) | 1978-05-20 |
| JPS6028137Y2 JPS6028137Y2 (ja) | 1985-08-26 |
Family
ID=28749853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14107576U Expired JPS6028137Y2 (ja) | 1976-10-20 | 1976-10-20 | 電子ビ−ム露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6028137Y2 (OSRAM) |
-
1976
- 1976-10-20 JP JP14107576U patent/JPS6028137Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6028137Y2 (ja) | 1985-08-26 |