JPS5357561U - - Google Patents
Info
- Publication number
- JPS5357561U JPS5357561U JP13883476U JP13883476U JPS5357561U JP S5357561 U JPS5357561 U JP S5357561U JP 13883476 U JP13883476 U JP 13883476U JP 13883476 U JP13883476 U JP 13883476U JP S5357561 U JPS5357561 U JP S5357561U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13883476U JPS5357561U (en) | 1976-10-18 | 1976-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13883476U JPS5357561U (en) | 1976-10-18 | 1976-10-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5357561U true JPS5357561U (en) | 1978-05-17 |
Family
ID=28747599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13883476U Pending JPS5357561U (en) | 1976-10-18 | 1976-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5357561U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11931853B2 (en) | 2021-03-05 | 2024-03-19 | Applied Materials, Inc. | Control of processing parameters for substrate polishing with angularly distributed zones using cost function |
-
1976
- 1976-10-18 JP JP13883476U patent/JPS5357561U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11931853B2 (en) | 2021-03-05 | 2024-03-19 | Applied Materials, Inc. | Control of processing parameters for substrate polishing with angularly distributed zones using cost function |