JPS5356482A - Fluid control device - Google Patents

Fluid control device

Info

Publication number
JPS5356482A
JPS5356482A JP13198976A JP13198976A JPS5356482A JP S5356482 A JPS5356482 A JP S5356482A JP 13198976 A JP13198976 A JP 13198976A JP 13198976 A JP13198976 A JP 13198976A JP S5356482 A JPS5356482 A JP S5356482A
Authority
JP
Japan
Prior art keywords
control device
fluid control
actuator
flow rate
controlled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13198976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS615005B2 (cs
Inventor
Kenji Masuda
Masaaki Suhara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daikin Industries Ltd
Original Assignee
Daikin Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daikin Industries Ltd filed Critical Daikin Industries Ltd
Priority to JP13198976A priority Critical patent/JPS5356482A/ja
Publication of JPS5356482A publication Critical patent/JPS5356482A/ja
Publication of JPS615005B2 publication Critical patent/JPS615005B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Servomotors (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Feedback Control In General (AREA)
JP13198976A 1976-11-01 1976-11-01 Fluid control device Granted JPS5356482A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13198976A JPS5356482A (en) 1976-11-01 1976-11-01 Fluid control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13198976A JPS5356482A (en) 1976-11-01 1976-11-01 Fluid control device

Publications (2)

Publication Number Publication Date
JPS5356482A true JPS5356482A (en) 1978-05-22
JPS615005B2 JPS615005B2 (cs) 1986-02-14

Family

ID=15070944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13198976A Granted JPS5356482A (en) 1976-11-01 1976-11-01 Fluid control device

Country Status (1)

Country Link
JP (1) JPS5356482A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60112701U (ja) * 1984-12-06 1985-07-30 カヤバ工業株式会社 超高圧制御装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4003385C2 (de) * 1990-02-05 1996-03-28 Hirschmann Richard Gmbh Co Antennenanordnung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60112701U (ja) * 1984-12-06 1985-07-30 カヤバ工業株式会社 超高圧制御装置

Also Published As

Publication number Publication date
JPS615005B2 (cs) 1986-02-14

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