JPS5356201U - - Google Patents

Info

Publication number
JPS5356201U
JPS5356201U JP1976137181U JP13718176U JPS5356201U JP S5356201 U JPS5356201 U JP S5356201U JP 1976137181 U JP1976137181 U JP 1976137181U JP 13718176 U JP13718176 U JP 13718176U JP S5356201 U JPS5356201 U JP S5356201U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1976137181U
Other languages
Japanese (ja)
Other versions
JPS5841535Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976137181U priority Critical patent/JPS5841535Y2/ja
Publication of JPS5356201U publication Critical patent/JPS5356201U/ja
Application granted granted Critical
Publication of JPS5841535Y2 publication Critical patent/JPS5841535Y2/ja
Expired legal-status Critical Current

Links

JP1976137181U 1976-10-13 1976-10-13 露光用フォトマスク Expired JPS5841535Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976137181U JPS5841535Y2 (ja) 1976-10-13 1976-10-13 露光用フォトマスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976137181U JPS5841535Y2 (ja) 1976-10-13 1976-10-13 露光用フォトマスク

Publications (2)

Publication Number Publication Date
JPS5356201U true JPS5356201U (enrdf_load_stackoverflow) 1978-05-13
JPS5841535Y2 JPS5841535Y2 (ja) 1983-09-20

Family

ID=28746031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976137181U Expired JPS5841535Y2 (ja) 1976-10-13 1976-10-13 露光用フォトマスク

Country Status (1)

Country Link
JP (1) JPS5841535Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51107164U (enrdf_load_stackoverflow) * 1975-02-20 1976-08-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51107164U (enrdf_load_stackoverflow) * 1975-02-20 1976-08-27

Also Published As

Publication number Publication date
JPS5841535Y2 (ja) 1983-09-20

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