JPS535612B2 - - Google Patents
Info
- Publication number
- JPS535612B2 JPS535612B2 JP10271072A JP10271072A JPS535612B2 JP S535612 B2 JPS535612 B2 JP S535612B2 JP 10271072 A JP10271072 A JP 10271072A JP 10271072 A JP10271072 A JP 10271072A JP S535612 B2 JPS535612 B2 JP S535612B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10271072A JPS535612B2 (tr) | 1972-10-16 | 1972-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10271072A JPS535612B2 (tr) | 1972-10-16 | 1972-10-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4959729A JPS4959729A (tr) | 1974-06-10 |
| JPS535612B2 true JPS535612B2 (tr) | 1978-03-01 |
Family
ID=14334813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10271072A Expired JPS535612B2 (tr) | 1972-10-16 | 1972-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS535612B2 (tr) |
-
1972
- 1972-10-16 JP JP10271072A patent/JPS535612B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4959729A (tr) | 1974-06-10 |