JPS5355216U - - Google Patents
Info
- Publication number
- JPS5355216U JPS5355216U JP13846076U JP13846076U JPS5355216U JP S5355216 U JPS5355216 U JP S5355216U JP 13846076 U JP13846076 U JP 13846076U JP 13846076 U JP13846076 U JP 13846076U JP S5355216 U JPS5355216 U JP S5355216U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13846076U JPS5715944Y2 (cs) | 1976-10-14 | 1976-10-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13846076U JPS5715944Y2 (cs) | 1976-10-14 | 1976-10-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5355216U true JPS5355216U (cs) | 1978-05-11 |
| JPS5715944Y2 JPS5715944Y2 (cs) | 1982-04-02 |
Family
ID=28747244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13846076U Expired JPS5715944Y2 (cs) | 1976-10-14 | 1976-10-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5715944Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60197208A (ja) * | 1984-03-21 | 1985-10-05 | Canon Inc | 成膜装置 |
-
1976
- 1976-10-14 JP JP13846076U patent/JPS5715944Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60197208A (ja) * | 1984-03-21 | 1985-10-05 | Canon Inc | 成膜装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5715944Y2 (cs) | 1982-04-02 |