JPS5355216U - - Google Patents

Info

Publication number
JPS5355216U
JPS5355216U JP13846076U JP13846076U JPS5355216U JP S5355216 U JPS5355216 U JP S5355216U JP 13846076 U JP13846076 U JP 13846076U JP 13846076 U JP13846076 U JP 13846076U JP S5355216 U JPS5355216 U JP S5355216U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13846076U
Other languages
Japanese (ja)
Other versions
JPS5715944Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13846076U priority Critical patent/JPS5715944Y2/ja
Publication of JPS5355216U publication Critical patent/JPS5355216U/ja
Application granted granted Critical
Publication of JPS5715944Y2 publication Critical patent/JPS5715944Y2/ja
Expired legal-status Critical Current

Links

JP13846076U 1976-10-14 1976-10-14 Expired JPS5715944Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13846076U JPS5715944Y2 (cg-RX-API-DMAC7.html) 1976-10-14 1976-10-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13846076U JPS5715944Y2 (cg-RX-API-DMAC7.html) 1976-10-14 1976-10-14

Publications (2)

Publication Number Publication Date
JPS5355216U true JPS5355216U (cg-RX-API-DMAC7.html) 1978-05-11
JPS5715944Y2 JPS5715944Y2 (cg-RX-API-DMAC7.html) 1982-04-02

Family

ID=28747244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13846076U Expired JPS5715944Y2 (cg-RX-API-DMAC7.html) 1976-10-14 1976-10-14

Country Status (1)

Country Link
JP (1) JPS5715944Y2 (cg-RX-API-DMAC7.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60197208A (ja) * 1984-03-21 1985-10-05 Canon Inc 成膜装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60197208A (ja) * 1984-03-21 1985-10-05 Canon Inc 成膜装置

Also Published As

Publication number Publication date
JPS5715944Y2 (cg-RX-API-DMAC7.html) 1982-04-02

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