JPS5353639Y2 - - Google Patents

Info

Publication number
JPS5353639Y2
JPS5353639Y2 JP9760974U JP9760974U JPS5353639Y2 JP S5353639 Y2 JPS5353639 Y2 JP S5353639Y2 JP 9760974 U JP9760974 U JP 9760974U JP 9760974 U JP9760974 U JP 9760974U JP S5353639 Y2 JPS5353639 Y2 JP S5353639Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9760974U
Other languages
Japanese (ja)
Other versions
JPS5125045U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9760974U priority Critical patent/JPS5353639Y2/ja
Publication of JPS5125045U publication Critical patent/JPS5125045U/ja
Application granted granted Critical
Publication of JPS5353639Y2 publication Critical patent/JPS5353639Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Tubes (AREA)
  • Bag Frames (AREA)
JP9760974U 1974-08-15 1974-08-15 Expired JPS5353639Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9760974U JPS5353639Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-08-15 1974-08-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9760974U JPS5353639Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-08-15 1974-08-15

Publications (2)

Publication Number Publication Date
JPS5125045U JPS5125045U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-02-24
JPS5353639Y2 true JPS5353639Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-12-21

Family

ID=28297577

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9760974U Expired JPS5353639Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-08-15 1974-08-15

Country Status (1)

Country Link
JP (1) JPS5353639Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170038684A1 (en) * 2015-08-04 2017-02-09 Shin-Etsu Chemical Co., Ltd. Chemically Amplified Positive Resist Composition and Pattern Forming Process

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5536273Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1977-04-27 1980-08-26
JPS57124442U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-01-29 1982-08-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170038684A1 (en) * 2015-08-04 2017-02-09 Shin-Etsu Chemical Co., Ltd. Chemically Amplified Positive Resist Composition and Pattern Forming Process

Also Published As

Publication number Publication date
JPS5125045U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-02-24

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