JPS5352935Y2 - - Google Patents

Info

Publication number
JPS5352935Y2
JPS5352935Y2 JP1972146798U JP14679872U JPS5352935Y2 JP S5352935 Y2 JPS5352935 Y2 JP S5352935Y2 JP 1972146798 U JP1972146798 U JP 1972146798U JP 14679872 U JP14679872 U JP 14679872U JP S5352935 Y2 JPS5352935 Y2 JP S5352935Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1972146798U
Other languages
Japanese (ja)
Other versions
JPS4999844U (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1972146798U priority Critical patent/JPS5352935Y2/ja
Publication of JPS4999844U publication Critical patent/JPS4999844U/ja
Application granted granted Critical
Publication of JPS5352935Y2 publication Critical patent/JPS5352935Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1972146798U 1972-12-21 1972-12-21 Expired JPS5352935Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1972146798U JPS5352935Y2 (https=) 1972-12-21 1972-12-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1972146798U JPS5352935Y2 (https=) 1972-12-21 1972-12-21

Publications (2)

Publication Number Publication Date
JPS4999844U JPS4999844U (https=) 1974-08-28
JPS5352935Y2 true JPS5352935Y2 (https=) 1978-12-18

Family

ID=28435977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1972146798U Expired JPS5352935Y2 (https=) 1972-12-21 1972-12-21

Country Status (1)

Country Link
JP (1) JPS5352935Y2 (https=)

Also Published As

Publication number Publication date
JPS4999844U (https=) 1974-08-28

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