JPS535279U - - Google Patents

Info

Publication number
JPS535279U
JPS535279U JP8397676U JP8397676U JPS535279U JP S535279 U JPS535279 U JP S535279U JP 8397676 U JP8397676 U JP 8397676U JP 8397676 U JP8397676 U JP 8397676U JP S535279 U JPS535279 U JP S535279U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8397676U
Other languages
Japanese (ja)
Other versions
JPS5647106Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976083976U priority Critical patent/JPS5647106Y2/ja
Publication of JPS535279U publication Critical patent/JPS535279U/ja
Application granted granted Critical
Publication of JPS5647106Y2 publication Critical patent/JPS5647106Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
JP1976083976U 1976-06-28 1976-06-28 Expired JPS5647106Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976083976U JPS5647106Y2 (enrdf_load_stackoverflow) 1976-06-28 1976-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976083976U JPS5647106Y2 (enrdf_load_stackoverflow) 1976-06-28 1976-06-28

Publications (2)

Publication Number Publication Date
JPS535279U true JPS535279U (enrdf_load_stackoverflow) 1978-01-18
JPS5647106Y2 JPS5647106Y2 (enrdf_load_stackoverflow) 1981-11-04

Family

ID=28695713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976083976U Expired JPS5647106Y2 (enrdf_load_stackoverflow) 1976-06-28 1976-06-28

Country Status (1)

Country Link
JP (1) JPS5647106Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220087532A (ko) 2019-11-05 2022-06-24 도쿄엘렉트론가부시키가이샤 기판을 처리하는 장치, 원료 카트리지, 기판을 처리하는 방법 및 원료 카트리지를 제조하는 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS459315Y1 (enrdf_load_stackoverflow) * 1966-06-09 1970-05-01
JPS4943012U (enrdf_load_stackoverflow) * 1972-07-19 1974-04-16
JPS5118215U (enrdf_load_stackoverflow) * 1974-07-29 1976-02-10

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS459315Y1 (enrdf_load_stackoverflow) * 1966-06-09 1970-05-01
JPS4943012U (enrdf_load_stackoverflow) * 1972-07-19 1974-04-16
JPS5118215U (enrdf_load_stackoverflow) * 1974-07-29 1976-02-10

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220087532A (ko) 2019-11-05 2022-06-24 도쿄엘렉트론가부시키가이샤 기판을 처리하는 장치, 원료 카트리지, 기판을 처리하는 방법 및 원료 카트리지를 제조하는 방법

Also Published As

Publication number Publication date
JPS5647106Y2 (enrdf_load_stackoverflow) 1981-11-04

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