JPS535279U - - Google Patents

Info

Publication number
JPS535279U
JPS535279U JP8397676U JP8397676U JPS535279U JP S535279 U JPS535279 U JP S535279U JP 8397676 U JP8397676 U JP 8397676U JP 8397676 U JP8397676 U JP 8397676U JP S535279 U JPS535279 U JP S535279U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8397676U
Other languages
Japanese (ja)
Other versions
JPS5647106Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976083976U priority Critical patent/JPS5647106Y2/ja
Publication of JPS535279U publication Critical patent/JPS535279U/ja
Application granted granted Critical
Publication of JPS5647106Y2 publication Critical patent/JPS5647106Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
JP1976083976U 1976-06-28 1976-06-28 Expired JPS5647106Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976083976U JPS5647106Y2 (OSRAM) 1976-06-28 1976-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976083976U JPS5647106Y2 (OSRAM) 1976-06-28 1976-06-28

Publications (2)

Publication Number Publication Date
JPS535279U true JPS535279U (OSRAM) 1978-01-18
JPS5647106Y2 JPS5647106Y2 (OSRAM) 1981-11-04

Family

ID=28695713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976083976U Expired JPS5647106Y2 (OSRAM) 1976-06-28 1976-06-28

Country Status (1)

Country Link
JP (1) JPS5647106Y2 (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220087532A (ko) 2019-11-05 2022-06-24 도쿄엘렉트론가부시키가이샤 기판을 처리하는 장치, 원료 카트리지, 기판을 처리하는 방법 및 원료 카트리지를 제조하는 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS459315Y1 (OSRAM) * 1966-06-09 1970-05-01
JPS4943012U (OSRAM) * 1972-07-19 1974-04-16
JPS5118215U (OSRAM) * 1974-07-29 1976-02-10

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS459315Y1 (OSRAM) * 1966-06-09 1970-05-01
JPS4943012U (OSRAM) * 1972-07-19 1974-04-16
JPS5118215U (OSRAM) * 1974-07-29 1976-02-10

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220087532A (ko) 2019-11-05 2022-06-24 도쿄엘렉트론가부시키가이샤 기판을 처리하는 장치, 원료 카트리지, 기판을 처리하는 방법 및 원료 카트리지를 제조하는 방법

Also Published As

Publication number Publication date
JPS5647106Y2 (OSRAM) 1981-11-04

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