JPS5352354Y2 - - Google Patents

Info

Publication number
JPS5352354Y2
JPS5352354Y2 JP1974058993U JP5899374U JPS5352354Y2 JP S5352354 Y2 JPS5352354 Y2 JP S5352354Y2 JP 1974058993 U JP1974058993 U JP 1974058993U JP 5899374 U JP5899374 U JP 5899374U JP S5352354 Y2 JPS5352354 Y2 JP S5352354Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1974058993U
Other languages
Japanese (ja)
Other versions
JPS50147513U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974058993U priority Critical patent/JPS5352354Y2/ja
Publication of JPS50147513U publication Critical patent/JPS50147513U/ja
Application granted granted Critical
Publication of JPS5352354Y2 publication Critical patent/JPS5352354Y2/ja
Expired legal-status Critical Current

Links

JP1974058993U 1974-05-23 1974-05-23 Expired JPS5352354Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974058993U JPS5352354Y2 (en) 1974-05-23 1974-05-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974058993U JPS5352354Y2 (en) 1974-05-23 1974-05-23

Publications (2)

Publication Number Publication Date
JPS50147513U JPS50147513U (en) 1975-12-08
JPS5352354Y2 true JPS5352354Y2 (en) 1978-12-14

Family

ID=28217178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974058993U Expired JPS5352354Y2 (en) 1974-05-23 1974-05-23

Country Status (1)

Country Link
JP (1) JPS5352354Y2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7138813B2 (en) 1999-06-30 2006-11-21 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US7492175B2 (en) 2001-08-21 2009-02-17 Cascade Microtech, Inc. Membrane probing system
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7138813B2 (en) 1999-06-30 2006-11-21 Cascade Microtech, Inc. Probe station thermal chuck with shielding for capacitive current
US7492175B2 (en) 2001-08-21 2009-02-17 Cascade Microtech, Inc. Membrane probing system
US7492172B2 (en) 2003-05-23 2009-02-17 Cascade Microtech, Inc. Chuck for holding a device under test
US7876115B2 (en) 2003-05-23 2011-01-25 Cascade Microtech, Inc. Chuck for holding a device under test
US7420381B2 (en) 2004-09-13 2008-09-02 Cascade Microtech, Inc. Double sided probing structures
US8013623B2 (en) 2004-09-13 2011-09-06 Cascade Microtech, Inc. Double sided probing structures

Also Published As

Publication number Publication date
JPS50147513U (en) 1975-12-08

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