Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co LtdfiledCriticalToshiba Corp
Priority to JP12811176ApriorityCriticalpatent/JPS5352288A/en
Publication of JPS5352288ApublicationCriticalpatent/JPS5352288A/en
PURPOSE: To improve the concentration and efficiency of O3 with minimized energy and to achieve miniaturization and energy saving, by effecting the generation of O3 with raw material gas such as air being shut up in silent discharge space for the prescribed time.