JPS5352103U - - Google Patents
Info
- Publication number
- JPS5352103U JPS5352103U JP13369576U JP13369576U JPS5352103U JP S5352103 U JPS5352103 U JP S5352103U JP 13369576 U JP13369576 U JP 13369576U JP 13369576 U JP13369576 U JP 13369576U JP S5352103 U JPS5352103 U JP S5352103U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976133695U JPS5517292Y2 (en:Method) | 1976-10-06 | 1976-10-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976133695U JPS5517292Y2 (en:Method) | 1976-10-06 | 1976-10-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5352103U true JPS5352103U (en:Method) | 1978-05-04 |
| JPS5517292Y2 JPS5517292Y2 (en:Method) | 1980-04-22 |
Family
ID=28742659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976133695U Expired JPS5517292Y2 (en:Method) | 1976-10-06 | 1976-10-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5517292Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220106791A (ko) | 2019-11-26 | 2022-07-29 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치 및 기판 처리 방법 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5126250A (en) * | 1974-08-28 | 1976-03-04 | Takenori Nakagaki | Aokusamiganaku shokanoyoitonyu no seizoho |
-
1976
- 1976-10-06 JP JP1976133695U patent/JPS5517292Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5126250A (en) * | 1974-08-28 | 1976-03-04 | Takenori Nakagaki | Aokusamiganaku shokanoyoitonyu no seizoho |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220106791A (ko) | 2019-11-26 | 2022-07-29 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 장치 및 기판 처리 방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5517292Y2 (en:Method) | 1980-04-22 |