JPS5352103U - - Google Patents

Info

Publication number
JPS5352103U
JPS5352103U JP13369576U JP13369576U JPS5352103U JP S5352103 U JPS5352103 U JP S5352103U JP 13369576 U JP13369576 U JP 13369576U JP 13369576 U JP13369576 U JP 13369576U JP S5352103 U JPS5352103 U JP S5352103U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13369576U
Other languages
Japanese (ja)
Other versions
JPS5517292Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976133695U priority Critical patent/JPS5517292Y2/ja
Publication of JPS5352103U publication Critical patent/JPS5352103U/ja
Application granted granted Critical
Publication of JPS5517292Y2 publication Critical patent/JPS5517292Y2/ja
Expired legal-status Critical Current

Links

JP1976133695U 1976-10-06 1976-10-06 Expired JPS5517292Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976133695U JPS5517292Y2 (cs) 1976-10-06 1976-10-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976133695U JPS5517292Y2 (cs) 1976-10-06 1976-10-06

Publications (2)

Publication Number Publication Date
JPS5352103U true JPS5352103U (cs) 1978-05-04
JPS5517292Y2 JPS5517292Y2 (cs) 1980-04-22

Family

ID=28742659

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976133695U Expired JPS5517292Y2 (cs) 1976-10-06 1976-10-06

Country Status (1)

Country Link
JP (1) JPS5517292Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220106791A (ko) 2019-11-26 2022-07-29 도쿄엘렉트론가부시키가이샤 기판 처리 장치 및 기판 처리 방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5126250A (en) * 1974-08-28 1976-03-04 Takenori Nakagaki Aokusamiganaku shokanoyoitonyu no seizoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5126250A (en) * 1974-08-28 1976-03-04 Takenori Nakagaki Aokusamiganaku shokanoyoitonyu no seizoho

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220106791A (ko) 2019-11-26 2022-07-29 도쿄엘렉트론가부시키가이샤 기판 처리 장치 및 기판 처리 방법

Also Published As

Publication number Publication date
JPS5517292Y2 (cs) 1980-04-22

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