JPS5351563Y2 - - Google Patents
Info
- Publication number
- JPS5351563Y2 JPS5351563Y2 JP2270775U JP2270775U JPS5351563Y2 JP S5351563 Y2 JPS5351563 Y2 JP S5351563Y2 JP 2270775 U JP2270775 U JP 2270775U JP 2270775 U JP2270775 U JP 2270775U JP S5351563 Y2 JPS5351563 Y2 JP S5351563Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Handcart (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2270775U JPS5351563Y2 (nl) | 1975-02-18 | 1975-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2270775U JPS5351563Y2 (nl) | 1975-02-18 | 1975-02-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51103265U JPS51103265U (nl) | 1976-08-18 |
| JPS5351563Y2 true JPS5351563Y2 (nl) | 1978-12-09 |
Family
ID=28116401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2270775U Expired JPS5351563Y2 (nl) | 1975-02-18 | 1975-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5351563Y2 (nl) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108983552B (zh) * | 2017-05-31 | 2020-01-24 | 上海微电子装备（集团）股份有限公司 | 一种移入移出机构及光刻机工件台移入移出装置 |
-
1975
- 1975-02-18 JP JP2270775U patent/JPS5351563Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51103265U (nl) | 1976-08-18 |