JPS5351171U - - Google Patents

Info

Publication number
JPS5351171U
JPS5351171U JP13403276U JP13403276U JPS5351171U JP S5351171 U JPS5351171 U JP S5351171U JP 13403276 U JP13403276 U JP 13403276U JP 13403276 U JP13403276 U JP 13403276U JP S5351171 U JPS5351171 U JP S5351171U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13403276U
Other languages
Japanese (ja)
Other versions
JPS587973Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976134032U priority Critical patent/JPS587973Y2/ja
Publication of JPS5351171U publication Critical patent/JPS5351171U/ja
Application granted granted Critical
Publication of JPS587973Y2 publication Critical patent/JPS587973Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1976134032U 1976-10-05 1976-10-05 電子顕微鏡におけるビ−ム電流測定装置 Expired JPS587973Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976134032U JPS587973Y2 (ja) 1976-10-05 1976-10-05 電子顕微鏡におけるビ−ム電流測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976134032U JPS587973Y2 (ja) 1976-10-05 1976-10-05 電子顕微鏡におけるビ−ム電流測定装置

Publications (2)

Publication Number Publication Date
JPS5351171U true JPS5351171U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-05-01
JPS587973Y2 JPS587973Y2 (ja) 1983-02-12

Family

ID=28742984

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976134032U Expired JPS587973Y2 (ja) 1976-10-05 1976-10-05 電子顕微鏡におけるビ−ム電流測定装置

Country Status (1)

Country Link
JP (1) JPS587973Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60260353A (ja) * 1984-06-07 1985-12-23 Oki Electric Ind Co Ltd サ−マルヘツド

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117454U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-07-26 1976-02-07
JPS5147363A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-10-21 1976-04-22 Nippon Electron Optics Lab
JPS529366A (en) * 1975-07-11 1977-01-24 Hitachi Ltd Sample equipment for electron microscopes, etc

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117454U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-07-26 1976-02-07
JPS5147363A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1974-10-21 1976-04-22 Nippon Electron Optics Lab
JPS529366A (en) * 1975-07-11 1977-01-24 Hitachi Ltd Sample equipment for electron microscopes, etc

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60260353A (ja) * 1984-06-07 1985-12-23 Oki Electric Ind Co Ltd サ−マルヘツド

Also Published As

Publication number Publication date
JPS587973Y2 (ja) 1983-02-12

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