JPS5348591U - - Google Patents
Info
- Publication number
- JPS5348591U JPS5348591U JP13035176U JP13035176U JPS5348591U JP S5348591 U JPS5348591 U JP S5348591U JP 13035176 U JP13035176 U JP 13035176U JP 13035176 U JP13035176 U JP 13035176U JP S5348591 U JPS5348591 U JP S5348591U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Emergency Alarm Devices (AREA)
- Fire Alarms (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13035176U JPS577097Y2 (pt) | 1976-09-27 | 1976-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13035176U JPS577097Y2 (pt) | 1976-09-27 | 1976-09-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5348591U true JPS5348591U (pt) | 1978-04-24 |
| JPS577097Y2 JPS577097Y2 (pt) | 1982-02-10 |
Family
ID=28739495
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13035176U Expired JPS577097Y2 (pt) | 1976-09-27 | 1976-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS577097Y2 (pt) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5759346A (en) * | 1980-09-29 | 1982-04-09 | Nec Kyushu Ltd | Auxiliary holder for semiconductor substrate |
| JPS612341A (ja) * | 1984-06-15 | 1986-01-08 | Hitachi Ltd | ウエハ移し換え治具 |
-
1976
- 1976-09-27 JP JP13035176U patent/JPS577097Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5759346A (en) * | 1980-09-29 | 1982-04-09 | Nec Kyushu Ltd | Auxiliary holder for semiconductor substrate |
| JPS6130421B2 (pt) * | 1980-09-29 | 1986-07-14 | Kyushu Nippon Electric | |
| JPS612341A (ja) * | 1984-06-15 | 1986-01-08 | Hitachi Ltd | ウエハ移し換え治具 |
| JPH0570936B2 (pt) * | 1984-06-15 | 1993-10-06 | Hitachi Ltd |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS577097Y2 (pt) | 1982-02-10 |