JPS5348589Y2 - - Google Patents
Info
- Publication number
- JPS5348589Y2 JPS5348589Y2 JP1857274U JP1857274U JPS5348589Y2 JP S5348589 Y2 JPS5348589 Y2 JP S5348589Y2 JP 1857274 U JP1857274 U JP 1857274U JP 1857274 U JP1857274 U JP 1857274U JP S5348589 Y2 JPS5348589 Y2 JP S5348589Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Vertical, Hearth, Or Arc Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1857274U JPS5348589Y2 (ko) | 1974-02-18 | 1974-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1857274U JPS5348589Y2 (ko) | 1974-02-18 | 1974-02-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50109556U JPS50109556U (ko) | 1975-09-08 |
| JPS5348589Y2 true JPS5348589Y2 (ko) | 1978-11-21 |
Family
ID=28104761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1857274U Expired JPS5348589Y2 (ko) | 1974-02-18 | 1974-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5348589Y2 (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5128515A (en) * | 1990-05-21 | 1992-07-07 | Tokyo Electron Sagami Limited | Heating apparatus |
-
1974
- 1974-02-18 JP JP1857274U patent/JPS5348589Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5128515A (en) * | 1990-05-21 | 1992-07-07 | Tokyo Electron Sagami Limited | Heating apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50109556U (ko) | 1975-09-08 |