JPS5348566U - - Google Patents
Info
- Publication number
- JPS5348566U JPS5348566U JP13105276U JP13105276U JPS5348566U JP S5348566 U JPS5348566 U JP S5348566U JP 13105276 U JP13105276 U JP 13105276U JP 13105276 U JP13105276 U JP 13105276U JP S5348566 U JPS5348566 U JP S5348566U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13105276U JPS5348566U (cs) | 1976-09-28 | 1976-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13105276U JPS5348566U (cs) | 1976-09-28 | 1976-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5348566U true JPS5348566U (cs) | 1978-04-24 |
Family
ID=28740168
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13105276U Pending JPS5348566U (cs) | 1976-09-28 | 1976-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5348566U (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5216482A (en) * | 1975-07-30 | 1977-02-07 | Toshiba Corp | Surface treatment apparatus using activated gas |
-
1976
- 1976-09-28 JP JP13105276U patent/JPS5348566U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5216482A (en) * | 1975-07-30 | 1977-02-07 | Toshiba Corp | Surface treatment apparatus using activated gas |