JPS5346670B2 - - Google Patents

Info

Publication number
JPS5346670B2
JPS5346670B2 JP10124175A JP10124175A JPS5346670B2 JP S5346670 B2 JPS5346670 B2 JP S5346670B2 JP 10124175 A JP10124175 A JP 10124175A JP 10124175 A JP10124175 A JP 10124175A JP S5346670 B2 JPS5346670 B2 JP S5346670B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10124175A
Other languages
Japanese (ja)
Other versions
JPS5226173A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10124175A priority Critical patent/JPS5226173A/ja
Publication of JPS5226173A publication Critical patent/JPS5226173A/ja
Publication of JPS5346670B2 publication Critical patent/JPS5346670B2/ja
Granted legal-status Critical Current

Links

JP10124175A 1975-08-22 1975-08-22 Manufacturing method of disc wafer casing jig Granted JPS5226173A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10124175A JPS5226173A (en) 1975-08-22 1975-08-22 Manufacturing method of disc wafer casing jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10124175A JPS5226173A (en) 1975-08-22 1975-08-22 Manufacturing method of disc wafer casing jig

Publications (2)

Publication Number Publication Date
JPS5226173A JPS5226173A (en) 1977-02-26
JPS5346670B2 true JPS5346670B2 (fr) 1978-12-15

Family

ID=14295396

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10124175A Granted JPS5226173A (en) 1975-08-22 1975-08-22 Manufacturing method of disc wafer casing jig

Country Status (1)

Country Link
JP (1) JPS5226173A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06101449B2 (ja) * 1986-04-28 1994-12-12 株式会社福井信越石英 ウエハ支持ボ−ト

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5056148A (fr) * 1973-09-14 1975-05-16
JPS5062579A (fr) * 1973-10-02 1975-05-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5056148A (fr) * 1973-09-14 1975-05-16
JPS5062579A (fr) * 1973-10-02 1975-05-28

Also Published As

Publication number Publication date
JPS5226173A (en) 1977-02-26

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