JPS5346670B2 - - Google Patents
Info
- Publication number
- JPS5346670B2 JPS5346670B2 JP10124175A JP10124175A JPS5346670B2 JP S5346670 B2 JPS5346670 B2 JP S5346670B2 JP 10124175 A JP10124175 A JP 10124175A JP 10124175 A JP10124175 A JP 10124175A JP S5346670 B2 JPS5346670 B2 JP S5346670B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10124175A JPS5226173A (en) | 1975-08-22 | 1975-08-22 | Manufacturing method of disc wafer casing jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10124175A JPS5226173A (en) | 1975-08-22 | 1975-08-22 | Manufacturing method of disc wafer casing jig |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5226173A JPS5226173A (en) | 1977-02-26 |
| JPS5346670B2 true JPS5346670B2 (es) | 1978-12-15 |
Family
ID=14295396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10124175A Granted JPS5226173A (en) | 1975-08-22 | 1975-08-22 | Manufacturing method of disc wafer casing jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5226173A (es) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06101449B2 (ja) * | 1986-04-28 | 1994-12-12 | 株式会社福井信越石英 | ウエハ支持ボ−ト |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5056148A (es) * | 1973-09-14 | 1975-05-16 | ||
| JPS5062579A (es) * | 1973-10-02 | 1975-05-28 |
-
1975
- 1975-08-22 JP JP10124175A patent/JPS5226173A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5056148A (es) * | 1973-09-14 | 1975-05-16 | ||
| JPS5062579A (es) * | 1973-10-02 | 1975-05-28 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5226173A (en) | 1977-02-26 |