JPS5344797B2 - - Google Patents

Info

Publication number
JPS5344797B2
JPS5344797B2 JP7075876A JP7075876A JPS5344797B2 JP S5344797 B2 JPS5344797 B2 JP S5344797B2 JP 7075876 A JP7075876 A JP 7075876A JP 7075876 A JP7075876 A JP 7075876A JP S5344797 B2 JPS5344797 B2 JP S5344797B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7075876A
Other languages
Japanese (ja)
Other versions
JPS52153668A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7075876A priority Critical patent/JPS52153668A/ja
Publication of JPS52153668A publication Critical patent/JPS52153668A/ja
Publication of JPS5344797B2 publication Critical patent/JPS5344797B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP7075876A 1976-06-16 1976-06-16 Photo mask of semiconductor integrated circuit Granted JPS52153668A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7075876A JPS52153668A (en) 1976-06-16 1976-06-16 Photo mask of semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7075876A JPS52153668A (en) 1976-06-16 1976-06-16 Photo mask of semiconductor integrated circuit

Publications (2)

Publication Number Publication Date
JPS52153668A JPS52153668A (en) 1977-12-20
JPS5344797B2 true JPS5344797B2 (xx) 1978-12-01

Family

ID=13440717

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7075876A Granted JPS52153668A (en) 1976-06-16 1976-06-16 Photo mask of semiconductor integrated circuit

Country Status (1)

Country Link
JP (1) JPS52153668A (xx)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101255910B1 (ko) * 2010-11-30 2013-04-17 삼성전기주식회사 노광 장치

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49127703A (xx) * 1973-04-18 1974-12-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49127703A (xx) * 1973-04-18 1974-12-06

Also Published As

Publication number Publication date
JPS52153668A (en) 1977-12-20

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