JPS5344796B2 - - Google Patents
Info
- Publication number
- JPS5344796B2 JPS5344796B2 JP7075776A JP7075776A JPS5344796B2 JP S5344796 B2 JPS5344796 B2 JP S5344796B2 JP 7075776 A JP7075776 A JP 7075776A JP 7075776 A JP7075776 A JP 7075776A JP S5344796 B2 JPS5344796 B2 JP S5344796B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7075776A JPS52153667A (en) | 1976-06-16 | 1976-06-16 | Photo mask of semiconductor integrated circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7075776A JPS52153667A (en) | 1976-06-16 | 1976-06-16 | Photo mask of semiconductor integrated circuit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52153667A JPS52153667A (en) | 1977-12-20 |
| JPS5344796B2 true JPS5344796B2 (index.php) | 1978-12-01 |
Family
ID=13440689
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7075776A Granted JPS52153667A (en) | 1976-06-16 | 1976-06-16 | Photo mask of semiconductor integrated circuit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52153667A (index.php) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52120551U (index.php) * | 1976-03-03 | 1977-09-13 |
-
1976
- 1976-06-16 JP JP7075776A patent/JPS52153667A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52153667A (en) | 1977-12-20 |