JPS534395B2 - - Google Patents

Info

Publication number
JPS534395B2
JPS534395B2 JP2044575A JP2044575A JPS534395B2 JP S534395 B2 JPS534395 B2 JP S534395B2 JP 2044575 A JP2044575 A JP 2044575A JP 2044575 A JP2044575 A JP 2044575A JP S534395 B2 JPS534395 B2 JP S534395B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2044575A
Other languages
Japanese (ja)
Other versions
JPS50125671A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS50125671A publication Critical patent/JPS50125671A/ja
Publication of JPS534395B2 publication Critical patent/JPS534395B2/ja
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/10Reaction chambers; Selection of materials therefor
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • C30B31/16Feed and outlet means for the gases; Modifying the flow of the gases
JP2044575A 1974-02-22 1975-02-20 Expired JPS534395B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742408650 DE2408650C3 (en) 1974-02-22 1974-02-22 Arrangement for doping semiconductor wafers

Publications (2)

Publication Number Publication Date
JPS50125671A JPS50125671A (en) 1975-10-02
JPS534395B2 true JPS534395B2 (en) 1978-02-16

Family

ID=5908226

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2044575A Expired JPS534395B2 (en) 1974-02-22 1975-02-20

Country Status (2)

Country Link
JP (1) JPS534395B2 (en)
DE (1) DE2408650C3 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019054215A1 (en) 2017-09-13 2019-03-21 日本化薬株式会社 Dispersion composition for ink, and water-based ink
WO2020175204A1 (en) 2019-02-25 2020-09-03 日本化薬株式会社 Dispersion liquid composition for ink, and ink composition

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5750734Y2 (en) * 1978-03-27 1982-11-06

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019054215A1 (en) 2017-09-13 2019-03-21 日本化薬株式会社 Dispersion composition for ink, and water-based ink
WO2020175204A1 (en) 2019-02-25 2020-09-03 日本化薬株式会社 Dispersion liquid composition for ink, and ink composition

Also Published As

Publication number Publication date
DE2408650C3 (en) 1979-01-25
DE2408650B2 (en) 1978-06-01
DE2408650A1 (en) 1975-09-11
JPS50125671A (en) 1975-10-02

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