JPS534352B2 - - Google Patents
Info
- Publication number
- JPS534352B2 JPS534352B2 JP11002175A JP11002175A JPS534352B2 JP S534352 B2 JPS534352 B2 JP S534352B2 JP 11002175 A JP11002175 A JP 11002175A JP 11002175 A JP11002175 A JP 11002175A JP S534352 B2 JPS534352 B2 JP S534352B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50110021A JPS5234585A (en) | 1975-09-12 | 1975-09-12 | Method for checking numbers of operation tools |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50110021A JPS5234585A (en) | 1975-09-12 | 1975-09-12 | Method for checking numbers of operation tools |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5234585A JPS5234585A (en) | 1977-03-16 |
JPS534352B2 true JPS534352B2 (en) | 1978-02-16 |
Family
ID=14525100
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50110021A Granted JPS5234585A (en) | 1975-09-12 | 1975-09-12 | Method for checking numbers of operation tools |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5234585A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62101045A (en) * | 1985-10-28 | 1987-05-11 | Toshiba Corp | Center aligner for wafer |
JPS6412708U (en) * | 1987-07-11 | 1989-01-23 | ||
JPH0235605U (en) * | 1988-08-26 | 1990-03-07 |
-
1975
- 1975-09-12 JP JP50110021A patent/JPS5234585A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5234585A (en) | 1977-03-16 |