JPS534352B2 - - Google Patents

Info

Publication number
JPS534352B2
JPS534352B2 JP11002175A JP11002175A JPS534352B2 JP S534352 B2 JPS534352 B2 JP S534352B2 JP 11002175 A JP11002175 A JP 11002175A JP 11002175 A JP11002175 A JP 11002175A JP S534352 B2 JPS534352 B2 JP S534352B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11002175A
Other languages
Japanese (ja)
Other versions
JPS5234585A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50110021A priority Critical patent/JPS5234585A/en
Publication of JPS5234585A publication Critical patent/JPS5234585A/en
Publication of JPS534352B2 publication Critical patent/JPS534352B2/ja
Granted legal-status Critical Current

Links

JP50110021A 1975-09-12 1975-09-12 Method for checking numbers of operation tools Granted JPS5234585A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50110021A JPS5234585A (en) 1975-09-12 1975-09-12 Method for checking numbers of operation tools

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50110021A JPS5234585A (en) 1975-09-12 1975-09-12 Method for checking numbers of operation tools

Publications (2)

Publication Number Publication Date
JPS5234585A JPS5234585A (en) 1977-03-16
JPS534352B2 true JPS534352B2 (en) 1978-02-16

Family

ID=14525100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50110021A Granted JPS5234585A (en) 1975-09-12 1975-09-12 Method for checking numbers of operation tools

Country Status (1)

Country Link
JP (1) JPS5234585A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62101045A (en) * 1985-10-28 1987-05-11 Toshiba Corp Center aligner for wafer
JPS6412708U (en) * 1987-07-11 1989-01-23
JPH0235605U (en) * 1988-08-26 1990-03-07

Also Published As

Publication number Publication date
JPS5234585A (en) 1977-03-16

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