JPS5343224B2 - - Google Patents
Info
- Publication number
- JPS5343224B2 JPS5343224B2 JP14074373A JP14074373A JPS5343224B2 JP S5343224 B2 JPS5343224 B2 JP S5343224B2 JP 14074373 A JP14074373 A JP 14074373A JP 14074373 A JP14074373 A JP 14074373A JP S5343224 B2 JPS5343224 B2 JP S5343224B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Filamentary Materials, Packages, And Safety Devices Therefor (AREA)
- Auxiliary Weaving Apparatuses, Weavers' Tools, And Shuttles (AREA)
- Warping, Beaming, Or Leasing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14074373A JPS5343224B2 (enExample) | 1973-12-15 | 1973-12-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14074373A JPS5343224B2 (enExample) | 1973-12-15 | 1973-12-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5089670A JPS5089670A (enExample) | 1975-07-18 |
| JPS5343224B2 true JPS5343224B2 (enExample) | 1978-11-17 |
Family
ID=15275672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14074373A Expired JPS5343224B2 (enExample) | 1973-12-15 | 1973-12-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5343224B2 (enExample) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190103496A (ko) | 2014-07-22 | 2019-09-04 | 가부시키가이샤 플로스피아 | 결정성 반도체막 및 판상체 및 반도체장치 |
| WO2020004250A1 (ja) | 2018-06-26 | 2020-01-02 | 株式会社Flosfia | 結晶性酸化物膜 |
| EP3674449A1 (en) | 2018-12-26 | 2020-07-01 | Flosfia Inc. | Crystalline oxide film |
| EP3674450A1 (en) | 2018-12-26 | 2020-07-01 | Flosfia Inc. | Crystalline oxide semiconductor |
| EP3783662A1 (en) | 2014-09-02 | 2021-02-24 | Flosfia Inc. | Laminated structure and method for manufacturing same, semiconductor device, and crystalline film |
| US11410850B2 (en) | 2018-09-03 | 2022-08-09 | Uacj Corporation | Aluminum oxide semiconductor manufacturing method and aluminum oxide semiconductor manufacturing device |
| US11488821B2 (en) | 2018-06-26 | 2022-11-01 | Flosfia Inc. | Film forming method and crystalline multilayer structure |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55768U (enExample) * | 1978-06-17 | 1980-01-07 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5038746B2 (enExample) * | 1971-12-06 | 1975-12-11 | ||
| JPS48107969U (enExample) * | 1972-03-14 | 1973-12-13 |
-
1973
- 1973-12-15 JP JP14074373A patent/JPS5343224B2/ja not_active Expired
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20190103496A (ko) | 2014-07-22 | 2019-09-04 | 가부시키가이샤 플로스피아 | 결정성 반도체막 및 판상체 및 반도체장치 |
| KR20200074277A (ko) | 2014-07-22 | 2020-06-24 | 가부시키가이샤 플로스피아 | 결정성 반도체막 및 판상체 및 반도체장치 |
| EP3783666A1 (en) | 2014-07-22 | 2021-02-24 | Flosfia Inc. | Crystalline semiconductor film, sheet like object, and semiconductor device |
| US11682702B2 (en) | 2014-07-22 | 2023-06-20 | Flosfia Inc. | Crystalline semiconductor film, plate-like body and semiconductor device |
| EP3783662A1 (en) | 2014-09-02 | 2021-02-24 | Flosfia Inc. | Laminated structure and method for manufacturing same, semiconductor device, and crystalline film |
| WO2020004250A1 (ja) | 2018-06-26 | 2020-01-02 | 株式会社Flosfia | 結晶性酸化物膜 |
| US11488821B2 (en) | 2018-06-26 | 2022-11-01 | Flosfia Inc. | Film forming method and crystalline multilayer structure |
| US11410850B2 (en) | 2018-09-03 | 2022-08-09 | Uacj Corporation | Aluminum oxide semiconductor manufacturing method and aluminum oxide semiconductor manufacturing device |
| TWI803691B (zh) * | 2018-09-03 | 2023-06-01 | 日商Uacj股份有限公司 | 半導體製造方法及半導體製造裝置 |
| EP3674449A1 (en) | 2018-12-26 | 2020-07-01 | Flosfia Inc. | Crystalline oxide film |
| EP3674450A1 (en) | 2018-12-26 | 2020-07-01 | Flosfia Inc. | Crystalline oxide semiconductor |
| US11152472B2 (en) | 2018-12-26 | 2021-10-19 | Flosfia Inc. | Crystalline oxide semiconductor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5089670A (enExample) | 1975-07-18 |