JPS5343135B2 - - Google Patents
Info
- Publication number
- JPS5343135B2 JPS5343135B2 JP12865272A JP12865272A JPS5343135B2 JP S5343135 B2 JPS5343135 B2 JP S5343135B2 JP 12865272 A JP12865272 A JP 12865272A JP 12865272 A JP12865272 A JP 12865272A JP S5343135 B2 JPS5343135 B2 JP S5343135B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Silicon Compounds (AREA)
- Chemical Treatment Of Metals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12865272A JPS5343135B2 (https=) | 1972-12-21 | 1972-12-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12865272A JPS5343135B2 (https=) | 1972-12-21 | 1972-12-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4986220A JPS4986220A (https=) | 1974-08-19 |
| JPS5343135B2 true JPS5343135B2 (https=) | 1978-11-17 |
Family
ID=14990090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12865272A Expired JPS5343135B2 (https=) | 1972-12-21 | 1972-12-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5343135B2 (https=) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS496463A (https=) * | 1972-05-10 | 1974-01-21 |
-
1972
- 1972-12-21 JP JP12865272A patent/JPS5343135B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4986220A (https=) | 1974-08-19 |