JPS5343135B2 - - Google Patents

Info

Publication number
JPS5343135B2
JPS5343135B2 JP12865272A JP12865272A JPS5343135B2 JP S5343135 B2 JPS5343135 B2 JP S5343135B2 JP 12865272 A JP12865272 A JP 12865272A JP 12865272 A JP12865272 A JP 12865272A JP S5343135 B2 JPS5343135 B2 JP S5343135B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12865272A
Other languages
Japanese (ja)
Other versions
JPS4986220A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12865272A priority Critical patent/JPS5343135B2/ja
Publication of JPS4986220A publication Critical patent/JPS4986220A/ja
Publication of JPS5343135B2 publication Critical patent/JPS5343135B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Silicon Compounds (AREA)
  • Chemical Treatment Of Metals (AREA)
JP12865272A 1972-12-21 1972-12-21 Expired JPS5343135B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12865272A JPS5343135B2 (enrdf_load_stackoverflow) 1972-12-21 1972-12-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12865272A JPS5343135B2 (enrdf_load_stackoverflow) 1972-12-21 1972-12-21

Publications (2)

Publication Number Publication Date
JPS4986220A JPS4986220A (enrdf_load_stackoverflow) 1974-08-19
JPS5343135B2 true JPS5343135B2 (enrdf_load_stackoverflow) 1978-11-17

Family

ID=14990090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12865272A Expired JPS5343135B2 (enrdf_load_stackoverflow) 1972-12-21 1972-12-21

Country Status (1)

Country Link
JP (1) JPS5343135B2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS496463A (enrdf_load_stackoverflow) * 1972-05-10 1974-01-21

Also Published As

Publication number Publication date
JPS4986220A (enrdf_load_stackoverflow) 1974-08-19

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