JPS5343015B2 - - Google Patents
Info
- Publication number
- JPS5343015B2 JPS5343015B2 JP15319076A JP15319076A JPS5343015B2 JP S5343015 B2 JPS5343015 B2 JP S5343015B2 JP 15319076 A JP15319076 A JP 15319076A JP 15319076 A JP15319076 A JP 15319076A JP S5343015 B2 JPS5343015 B2 JP S5343015B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15319076A JPS5377176A (en) | 1976-12-20 | 1976-12-20 | Pattern forming method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15319076A JPS5377176A (en) | 1976-12-20 | 1976-12-20 | Pattern forming method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5377176A JPS5377176A (en) | 1978-07-08 |
| JPS5343015B2 true JPS5343015B2 (show.php) | 1978-11-16 |
Family
ID=15557004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15319076A Granted JPS5377176A (en) | 1976-12-20 | 1976-12-20 | Pattern forming method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5377176A (show.php) |
-
1976
- 1976-12-20 JP JP15319076A patent/JPS5377176A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5377176A (en) | 1978-07-08 |