JPS5342675B2 - - Google Patents

Info

Publication number
JPS5342675B2
JPS5342675B2 JP7712275A JP7712275A JPS5342675B2 JP S5342675 B2 JPS5342675 B2 JP S5342675B2 JP 7712275 A JP7712275 A JP 7712275A JP 7712275 A JP7712275 A JP 7712275A JP S5342675 B2 JPS5342675 B2 JP S5342675B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7712275A
Other versions
JPS5119977A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5119977A publication Critical patent/JPS5119977A/ja
Publication of JPS5342675B2 publication Critical patent/JPS5342675B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/1471—Arrangements for directing or deflecting the discharge along a desired path for centering, aligning or positioning of ray or beam

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP7712275A 1974-07-26 1975-06-24 Expired JPS5342675B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/492,096 US4000440A (en) 1974-07-26 1974-07-26 Method and apparatus for controlling brightness and alignment of a beam of charged particles

Publications (2)

Publication Number Publication Date
JPS5119977A JPS5119977A (ja) 1976-02-17
JPS5342675B2 true JPS5342675B2 (ja) 1978-11-14

Family

ID=23954926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7712275A Expired JPS5342675B2 (ja) 1974-07-26 1975-06-24

Country Status (11)

Country Link
US (1) US4000440A (ja)
JP (1) JPS5342675B2 (ja)
BR (1) BR7504789A (ja)
CA (2) CA1041178A (ja)
CH (1) CH587560A5 (ja)
DE (1) DE2525205C2 (ja)
ES (1) ES439704A1 (ja)
FR (1) FR2280134A1 (ja)
IT (1) IT1039024B (ja)
NL (1) NL7508942A (ja)
SE (1) SE401883B (ja)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL177578C (nl) * 1976-05-14 1985-10-16 Thomson Csf Inrichting voor het beschrijven van een voorwerp met een deeltjesbundel.
US4126814A (en) * 1976-12-09 1978-11-21 Rca Corporation Electron gun control system
US4424448A (en) * 1979-12-26 1984-01-03 Tokyo Shibaura Denki Kabushiki Kaisha Electron beam apparatus
US4376249A (en) * 1980-11-06 1983-03-08 International Business Machines Corporation Variable axis electron beam projection system
JPS58106747A (ja) * 1981-12-18 1983-06-25 Hitachi Ltd 荷電粒子線集束系の自動軸合せ装置
US4475045A (en) * 1982-05-24 1984-10-02 Varian Associates, Inc. Rapid pumpdown for high vacuum processing
US4568861A (en) * 1983-06-27 1986-02-04 International Business Machines Corporation Method and apparatus for controlling alignment and brightness of an electron beam
US5466904A (en) * 1993-12-23 1995-11-14 International Business Machines Corporation Electron beam lithography system
US6456019B1 (en) 2001-02-03 2002-09-24 Nikon Corporation Real time measurement of leakage current in high voltage electron guns

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48102971A (ja) * 1972-04-07 1973-12-24

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3345529A (en) * 1966-08-29 1967-10-03 Ibm Electron beam column with demountable flux-generating assembly and beam-forming elements
NL6807439A (ja) * 1968-05-27 1969-12-01
US3644700A (en) * 1969-12-15 1972-02-22 Ibm Method and apparatus for controlling an electron beam
US3619717A (en) * 1970-03-02 1971-11-09 Gen Electric Electron beam current regulator for a light valve

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS48102971A (ja) * 1972-04-07 1973-12-24

Also Published As

Publication number Publication date
SE7508426L (sv) 1976-01-27
CA1041178A (en) 1978-10-24
FR2280134A1 (fr) 1976-02-20
US4000440A (en) 1976-12-28
CA1054682A (en) 1979-05-15
JPS5119977A (ja) 1976-02-17
DE2525205C2 (de) 1983-05-19
ES439704A1 (es) 1977-03-01
IT1039024B (it) 1979-12-10
DE2525205A1 (de) 1976-02-12
CH587560A5 (ja) 1977-05-13
SE401883B (sv) 1978-05-29
BR7504789A (pt) 1976-07-06
NL7508942A (nl) 1976-01-28
FR2280134B1 (ja) 1977-12-09

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