JPS5342670B2 - - Google Patents
Info
- Publication number
- JPS5342670B2 JPS5342670B2 JP2163775A JP2163775A JPS5342670B2 JP S5342670 B2 JPS5342670 B2 JP S5342670B2 JP 2163775 A JP2163775 A JP 2163775A JP 2163775 A JP2163775 A JP 2163775A JP S5342670 B2 JPS5342670 B2 JP S5342670B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2163775A JPS5196288A (en) | 1975-02-20 | 1975-02-20 | Shirikonsankamakuno seiseihoho |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2163775A JPS5196288A (en) | 1975-02-20 | 1975-02-20 | Shirikonsankamakuno seiseihoho |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5196288A JPS5196288A (en) | 1976-08-24 |
| JPS5342670B2 true JPS5342670B2 (hu) | 1978-11-14 |
Family
ID=12060574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2163775A Granted JPS5196288A (en) | 1975-02-20 | 1975-02-20 | Shirikonsankamakuno seiseihoho |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5196288A (hu) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005228965A (ja) | 2004-02-13 | 2005-08-25 | Elpida Memory Inc | 半導体装置の製造方法およびその製造装置 |
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1975
- 1975-02-20 JP JP2163775A patent/JPS5196288A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5196288A (en) | 1976-08-24 |