JPS5342669A - Magnetron magnetic circuit for sputtering device - Google Patents

Magnetron magnetic circuit for sputtering device

Info

Publication number
JPS5342669A
JPS5342669A JP11800676A JP11800676A JPS5342669A JP S5342669 A JPS5342669 A JP S5342669A JP 11800676 A JP11800676 A JP 11800676A JP 11800676 A JP11800676 A JP 11800676A JP S5342669 A JPS5342669 A JP S5342669A
Authority
JP
Japan
Prior art keywords
magnetic circuit
sputtering device
magnetron magnetic
magnetron
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11800676A
Other languages
Japanese (ja)
Other versions
JPS5848028B2 (en
Inventor
Akihiro Kitahata
Tetsuya Date
Takanobu Miyamoto
Teruyoshi Kukita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SANYOU SHINKUU KOUGIYOU KK
Hitachi Metals Ltd
Original Assignee
SANYOU SHINKUU KOUGIYOU KK
Sumitomo Special Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SANYOU SHINKUU KOUGIYOU KK, Sumitomo Special Metals Co Ltd filed Critical SANYOU SHINKUU KOUGIYOU KK
Priority to JP11800676A priority Critical patent/JPS5848028B2/en
Publication of JPS5342669A publication Critical patent/JPS5342669A/en
Publication of JPS5848028B2 publication Critical patent/JPS5848028B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Constitution Of High-Frequency Heating (AREA)
JP11800676A 1976-09-30 1976-09-30 Magnetron magnetic circuit for sputtering equipment Expired JPS5848028B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11800676A JPS5848028B2 (en) 1976-09-30 1976-09-30 Magnetron magnetic circuit for sputtering equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11800676A JPS5848028B2 (en) 1976-09-30 1976-09-30 Magnetron magnetic circuit for sputtering equipment

Publications (2)

Publication Number Publication Date
JPS5342669A true JPS5342669A (en) 1978-04-18
JPS5848028B2 JPS5848028B2 (en) 1983-10-26

Family

ID=14725707

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11800676A Expired JPS5848028B2 (en) 1976-09-30 1976-09-30 Magnetron magnetic circuit for sputtering equipment

Country Status (1)

Country Link
JP (1) JPS5848028B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3212061C2 (en) * 1982-04-01 1986-08-21 Philips Patentverwaltung Gmbh, 2000 Hamburg Transformer with a wound bobbin

Also Published As

Publication number Publication date
JPS5848028B2 (en) 1983-10-26

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