JPS5342669A - Magnetron magnetic circuit for sputtering device - Google Patents
Magnetron magnetic circuit for sputtering deviceInfo
- Publication number
- JPS5342669A JPS5342669A JP11800676A JP11800676A JPS5342669A JP S5342669 A JPS5342669 A JP S5342669A JP 11800676 A JP11800676 A JP 11800676A JP 11800676 A JP11800676 A JP 11800676A JP S5342669 A JPS5342669 A JP S5342669A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic circuit
- sputtering device
- magnetron magnetic
- magnetron
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Constitution Of High-Frequency Heating (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11800676A JPS5848028B2 (en) | 1976-09-30 | 1976-09-30 | Magnetron magnetic circuit for sputtering equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11800676A JPS5848028B2 (en) | 1976-09-30 | 1976-09-30 | Magnetron magnetic circuit for sputtering equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5342669A true JPS5342669A (en) | 1978-04-18 |
JPS5848028B2 JPS5848028B2 (en) | 1983-10-26 |
Family
ID=14725707
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11800676A Expired JPS5848028B2 (en) | 1976-09-30 | 1976-09-30 | Magnetron magnetic circuit for sputtering equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5848028B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3212061C2 (en) * | 1982-04-01 | 1986-08-21 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Transformer with a wound bobbin |
-
1976
- 1976-09-30 JP JP11800676A patent/JPS5848028B2/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5848028B2 (en) | 1983-10-26 |
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