JPS5341430Y2 - - Google Patents

Info

Publication number
JPS5341430Y2
JPS5341430Y2 JP1972078932U JP7893272U JPS5341430Y2 JP S5341430 Y2 JPS5341430 Y2 JP S5341430Y2 JP 1972078932 U JP1972078932 U JP 1972078932U JP 7893272 U JP7893272 U JP 7893272U JP S5341430 Y2 JPS5341430 Y2 JP S5341430Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1972078932U
Other languages
Japanese (ja)
Other versions
JPS4936866U (id
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1972078932U priority Critical patent/JPS5341430Y2/ja
Priority to US303594A priority patent/US3890564A/en
Publication of JPS4936866U publication Critical patent/JPS4936866U/ja
Application granted granted Critical
Publication of JPS5341430Y2 publication Critical patent/JPS5341430Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP1972078932U 1972-07-04 1972-07-04 Expired JPS5341430Y2 (id)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1972078932U JPS5341430Y2 (id) 1972-07-04 1972-07-04
US303594A US3890564A (en) 1972-07-04 1972-11-03 Apparatus for inducing eddy current in a semiconductor wafer for measuring the electric conductivity or resistivity thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1972078932U JPS5341430Y2 (id) 1972-07-04 1972-07-04

Publications (2)

Publication Number Publication Date
JPS4936866U JPS4936866U (id) 1974-04-01
JPS5341430Y2 true JPS5341430Y2 (id) 1978-10-05

Family

ID=27983536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1972078932U Expired JPS5341430Y2 (id) 1972-07-04 1972-07-04

Country Status (1)

Country Link
JP (1) JPS5341430Y2 (id)

Also Published As

Publication number Publication date
JPS4936866U (id) 1974-04-01

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