JPS5341142B2 - - Google Patents

Info

Publication number
JPS5341142B2
JPS5341142B2 JP9058372A JP9058372A JPS5341142B2 JP S5341142 B2 JPS5341142 B2 JP S5341142B2 JP 9058372 A JP9058372 A JP 9058372A JP 9058372 A JP9058372 A JP 9058372A JP S5341142 B2 JPS5341142 B2 JP S5341142B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9058372A
Other languages
Japanese (ja)
Other versions
JPS4945035A (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9058372A priority Critical patent/JPS5341142B2/ja
Publication of JPS4945035A publication Critical patent/JPS4945035A/ja
Publication of JPS5341142B2 publication Critical patent/JPS5341142B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP9058372A 1972-09-08 1972-09-08 Expired JPS5341142B2 (en))

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9058372A JPS5341142B2 (en)) 1972-09-08 1972-09-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9058372A JPS5341142B2 (en)) 1972-09-08 1972-09-08

Publications (2)

Publication Number Publication Date
JPS4945035A JPS4945035A (en)) 1974-04-27
JPS5341142B2 true JPS5341142B2 (en)) 1978-10-31

Family

ID=14002451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9058372A Expired JPS5341142B2 (en)) 1972-09-08 1972-09-08

Country Status (1)

Country Link
JP (1) JPS5341142B2 (en))

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6066825A (ja) * 1983-09-22 1985-04-17 Toshiba Corp 半導体装置の製造方法
JPS60156662A (ja) * 1984-01-25 1985-08-16 Eiwa Kasei Kogyo Kk Ｐ，ｐ′−オキシビス（ベンゼンスルホニルクロライド）の製造方法
US4681657A (en) * 1985-10-31 1987-07-21 International Business Machines Corporation Preferential chemical etch for doped silicon
JP3077304B2 (ja) * 1991-10-09 2000-08-14 日産自動車株式会社 エッチング装置
US5376214A (en) * 1992-09-22 1994-12-27 Nissan Motor Co., Ltd. Etching device

Also Published As

Publication number Publication date
JPS4945035A (en)) 1974-04-27

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