JPS5341075B2 - - Google Patents

Info

Publication number
JPS5341075B2
JPS5341075B2 JP14864574A JP14864574A JPS5341075B2 JP S5341075 B2 JPS5341075 B2 JP S5341075B2 JP 14864574 A JP14864574 A JP 14864574A JP 14864574 A JP14864574 A JP 14864574A JP S5341075 B2 JPS5341075 B2 JP S5341075B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14864574A
Other languages
Japanese (ja)
Other versions
JPS5176978A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14864574A priority Critical patent/JPS5341075B2/ja
Publication of JPS5176978A publication Critical patent/JPS5176978A/ja
Publication of JPS5341075B2 publication Critical patent/JPS5341075B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP14864574A 1974-12-27 1974-12-27 Expired JPS5341075B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14864574A JPS5341075B2 (enrdf_load_stackoverflow) 1974-12-27 1974-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14864574A JPS5341075B2 (enrdf_load_stackoverflow) 1974-12-27 1974-12-27

Publications (2)

Publication Number Publication Date
JPS5176978A JPS5176978A (enrdf_load_stackoverflow) 1976-07-03
JPS5341075B2 true JPS5341075B2 (enrdf_load_stackoverflow) 1978-10-31

Family

ID=15457418

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14864574A Expired JPS5341075B2 (enrdf_load_stackoverflow) 1974-12-27 1974-12-27

Country Status (1)

Country Link
JP (1) JPS5341075B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55157537U (enrdf_load_stackoverflow) * 1979-04-28 1980-11-12
DE3586668T2 (de) * 1984-06-20 1993-04-01 Gould Inc Laserverfahren zur photomaskenreparatur.

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS529508B2 (enrdf_load_stackoverflow) * 1972-10-02 1977-03-16

Also Published As

Publication number Publication date
JPS5176978A (enrdf_load_stackoverflow) 1976-07-03

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