JPS5341068U - - Google Patents
Info
- Publication number
- JPS5341068U JPS5341068U JP12312776U JP12312776U JPS5341068U JP S5341068 U JPS5341068 U JP S5341068U JP 12312776 U JP12312776 U JP 12312776U JP 12312776 U JP12312776 U JP 12312776U JP S5341068 U JPS5341068 U JP S5341068U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12312776U JPS5341068U (ru) | 1976-09-13 | 1976-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12312776U JPS5341068U (ru) | 1976-09-13 | 1976-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5341068U true JPS5341068U (ru) | 1978-04-10 |
Family
ID=28732551
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12312776U Pending JPS5341068U (ru) | 1976-09-13 | 1976-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5341068U (ru) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63198330A (ja) * | 1987-02-13 | 1988-08-17 | Tokyo Electron Ltd | レジスト塗布方法およびその装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS48833U (ru) * | 1971-05-25 | 1973-01-08 | ||
| JPS49112158U (ru) * | 1972-12-29 | 1974-09-25 | ||
| JPS5325269B1 (ru) * | 1969-04-03 | 1978-07-26 |
-
1976
- 1976-09-13 JP JP12312776U patent/JPS5341068U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5325269B1 (ru) * | 1969-04-03 | 1978-07-26 | ||
| JPS48833U (ru) * | 1971-05-25 | 1973-01-08 | ||
| JPS49112158U (ru) * | 1972-12-29 | 1974-09-25 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63198330A (ja) * | 1987-02-13 | 1988-08-17 | Tokyo Electron Ltd | レジスト塗布方法およびその装置 |