JPS534075B2 - - Google Patents

Info

Publication number
JPS534075B2
JPS534075B2 JP13069175A JP13069175A JPS534075B2 JP S534075 B2 JPS534075 B2 JP S534075B2 JP 13069175 A JP13069175 A JP 13069175A JP 13069175 A JP13069175 A JP 13069175A JP S534075 B2 JPS534075 B2 JP S534075B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13069175A
Other languages
Japanese (ja)
Other versions
JPS5253776A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13069175A priority Critical patent/JPS5253776A/ja
Publication of JPS5253776A publication Critical patent/JPS5253776A/ja
Publication of JPS534075B2 publication Critical patent/JPS534075B2/ja
Granted legal-status Critical Current

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Landscapes

  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP13069175A 1975-10-30 1975-10-30 Apparatus for single crystal growth Granted JPS5253776A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13069175A JPS5253776A (en) 1975-10-30 1975-10-30 Apparatus for single crystal growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13069175A JPS5253776A (en) 1975-10-30 1975-10-30 Apparatus for single crystal growth

Publications (2)

Publication Number Publication Date
JPS5253776A JPS5253776A (en) 1977-04-30
JPS534075B2 true JPS534075B2 (it) 1978-02-14

Family

ID=15040302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13069175A Granted JPS5253776A (en) 1975-10-30 1975-10-30 Apparatus for single crystal growth

Country Status (1)

Country Link
JP (1) JPS5253776A (it)

Also Published As

Publication number Publication date
JPS5253776A (en) 1977-04-30

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