JPS5340634B2 - - Google Patents

Info

Publication number
JPS5340634B2
JPS5340634B2 JP1012976A JP1012976A JPS5340634B2 JP S5340634 B2 JPS5340634 B2 JP S5340634B2 JP 1012976 A JP1012976 A JP 1012976A JP 1012976 A JP1012976 A JP 1012976A JP S5340634 B2 JPS5340634 B2 JP S5340634B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1012976A
Other languages
Japanese (ja)
Other versions
JPS5293493A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1012976A priority Critical patent/JPS5293493A/ja
Publication of JPS5293493A publication Critical patent/JPS5293493A/ja
Publication of JPS5340634B2 publication Critical patent/JPS5340634B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP1012976A 1976-02-02 1976-02-02 Preparation of macromolecular materials for electron beam resists Granted JPS5293493A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1012976A JPS5293493A (en) 1976-02-02 1976-02-02 Preparation of macromolecular materials for electron beam resists

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1012976A JPS5293493A (en) 1976-02-02 1976-02-02 Preparation of macromolecular materials for electron beam resists

Publications (2)

Publication Number Publication Date
JPS5293493A JPS5293493A (en) 1977-08-05
JPS5340634B2 true JPS5340634B2 (US20050192411A1-20050901-C00001.png) 1978-10-28

Family

ID=11741665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1012976A Granted JPS5293493A (en) 1976-02-02 1976-02-02 Preparation of macromolecular materials for electron beam resists

Country Status (1)

Country Link
JP (1) JPS5293493A (US20050192411A1-20050901-C00001.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55105244A (en) * 1979-02-06 1980-08-12 Victor Co Of Japan Ltd Electron beam resist

Also Published As

Publication number Publication date
JPS5293493A (en) 1977-08-05

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